SMC XLA-16G-2M9//, XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers., Flange Size: 16
Flange Type: None [KF(NW)]
Indicator/Pilot port direction: G (w/Indicator, Rear Flange Surface)
Temperature/Heater: 5 to 60 °C
Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet)
Lead Wire Length: 05 M (Or None in the Case of No Auto Switch)
Number of Autoswitches/Mounting position: None
Body Surface Treatment: External
Seal Material: FKM (1349-80)
Seal Replacement (Refer to PDF on page 4): None