SMC XLS-16-5D-Q, XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers., Valve Size: 16
Voltage: 5 (24VDC)
Electrical Entry: D (DIN Terminal)
CE Marked: Q (CE Marked)